MFC 3 slm Cl2

Model: UFC-1100

Category	Mass flow Controller
Manufacturer	Unit
Model	UFC-1100
Flow Range	Min: 0.00 sccm Max: 3,000.00 sccm 501–5,000 sccm
Analog Signal	4-20 mA
Digital Signal	None
Seals	Kalrez
Fittings	VCR
Connector	9 pins
Inlet Pressure	More to 0 psig
Calibrated Gas	Cl2