Nitrogen Equivalent Calculator
Enter the desired gas and flow rate to calculate the N₂ equivalent and find matching controllers.
N₂ Equivalent Flow
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sccm N₂
Gas
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Desired flow
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N₂ Equivalent (sccm) = Desired Flow (sccm) × Brooks Conversion Factor (CF):
N₂ Equivalent (sccm) = Desired Flow (sccm) × Brooks Conversion Factor (CF)
Products within ±500 sccm of the N₂ equivalent are shown as candidates.
N₂ Equivalent (sccm) = Desired Flow (sccm) × Brooks Conversion Factor (CF)
Products within ±500 sccm of the N₂ equivalent are shown as candidates.
Gas Conversion Factor Reference
| Gas Name | Formula | Brooks CF |
|---|---|---|
| 1,1-Difluoro-1-Chloroethane | C2H3ClF |
0.341 |
| 1,1-Difluoroethane | CH3CHF2 |
0.415 |
| 1,1-Difluoroethylene | CH2:CF2 |
0.458 |
| 1,2-Dichlorotetrafluoroethane | C2Cl2F4 |
0.231 |
| 1,3-Butadiene | C4H6 |
0.354 |
| 1-Butene | C4H8 |
0.32 |
| 2,2-Dimethylpropane | C(CH3)4 |
0.247 |
| 3-Methyl-1-butene | C5H10 |
0.252 |
| Acetylene (Ethyne) | C2H2 |
0.615 |
| Air | Mixture |
0.998 |
| Allene | C3H4 |
0.478 |
| Ammonia | NH3 |
0.786 |
| Argon | Ar |
1.395 |
| Arsine | AsH3 |
0.754 |
| Boron Trichloride | BCl3 |
0.443 |
| Boron Trifluoride | BF3 |
0.579 |
| Bromotrifluoroethylene | C2BrF3 |
0.326 |
| Bromotrifluoromethane | CBrF3 |
0.412 |
| Butane | C4H10 |
0.257 |
| Carbon Dioxide | CO2 |
0.773 |
| Carbon Disulfide | CS2 |
0.638 |
| Carbon Monoxide | CO |
0.995 |
| Carbon Tetrafluoride | CF4 |
0.44 |
| Carbonyl Fluoride | COF2 |
0.567 |
| Carbonyl Sulfide | COS |
0.68 |
| Chlorine | Cl2 |
0.876 |
| Chlorine Dioxide | ClO2 |
0.693 |
| Chlorine Trifluoride | ClF3 |
0.433 |
| Chlorodifluoromethane | CHClF2 |
0.505 |
| Chloropentafluoroethane | C2ClF5 |
0.243 |
| Chlorotrifluoroethylene | C2ClF3 |
0.337 |
| Chlorotrifluoromethane | CClF3 |
0.43 |
| CIS-2-Butene | C4H8 |
0.32 |
| Cyanogen | (CN)2 |
0.498 |
| Cyanogen Chloride | ClCN |
0.618 |
| Cyclobutane | C4H8 |
0.387 |
| Cyclopropane | C3H6 |
0.505 |
| Deuterium | D2 |
0.995 |
| Diborane | B2H6 |
0.448 |
| Dichlorodifluoromethane | CCl2F2 |
0.39 |
| Dichlorofluoromethane | CHCl2F |
0.456 |
| Dichlorosilane | SiH2Cl2 |
0.442 |
| Difluoromethane | CF2H2 |
0.627 |
| Dimethylamine | (CH3)2N |
0.37 |
| Dimethylether | (CH3)2O |
0.247 |
| Disilane | Si2H6 |
0.332 |
| Ethane | C2H6 |
0.394 |
| Ethyl Chloride | C2H5Cl |
0.408 |
| Ethylacetylene | C4H6 |
0.365 |
| Ethylene | C2H4 |
0.619 |
| Ethylene Oxide | C2H4O |
0.589 |
| Fluorine | F2 |
0.924 |
| Fluoroform | CHF3 |
0.529 |
| Germane | GeH4 |
0.649 |
| Helium | He |
1.386 |
| Hexafluoro 1,3-Butadiene | C4F6 |
0.213 |
| Hexafluoroacetone | C3F6O |
0.219 |
| Hexafluoroethane | C2F6 |
0.255 |
| Hexafluoropropylene (HFP) | C3F6 |
0.249 |
| Hydrogen | H2 |
1.008 |
| Hydrogen Bromide | HBr |
0.987 |
| Hydrogen Chloride | HCl |
0.983 |
| Hydrogen Fluoride | HF |
0.998 |
| Hydrogen Iodide | HI |
0.953 |
| Hydrogen Selenide | H2Se |
0.837 |
| Hydrogen Sulfide | H2S |
0.85 |
| Isobutane | C4H10 |
0.26 |
| Isobutylene | C4H8 |
0.289 |
| Krypton | Kr |
1.382 |
| Methane (Natural Gas) | CH4 |
0.763 |
| Methyl Bromide | CH3Br |
0.646 |
| Methyl Chloride | CH3Cl |
0.687 |
| Methyl Fluoride | CH3F |
0.761 |
| Methyl Mercaptan | CH4S |
0.588 |
| Methyl Vinyl Ether | C3H6O |
0.377 |
| Methylacetylene | C3H4 |
0.473 |
| Monoethylamine | C2H7 |
0.359 |
| Monomethylamine | CH3NH2 |
0.565 |
| Neon | Ne |
1.398 |
| Nitric Oxide | NO |
0.995 |
| Nitrogen | N2 |
1 |
| Nitrogen Trifluoride | NF3 |
0.501 |
| Nitrogen Trioxide | N2O3 |
0.443 |
| Nitrosyl Chloride | NOCl |
0.644 |
| Nitrous Oxide | N2O |
0.752 |
| Octofluorocyclobutane (LAM) | C4F8 |
0.169 |
| Oxygen | O2 |
0.988 |
| Oxygen Difluoride | OF2 |
0.672 |
| Ozone | O3 |
0.738 |
| Perchloryl Fluoride | ClO3F |
0.448 |
| Perfluoro-2-Butene | C4F8 |
0.268 |
| Perfluorobutane | C4F10 |
0.738 |
| Perfluoropropane | C3F8 |
0.179 |
| Phosgene | COCl2 |
0.504 |
| Phosphine | PH3 |
0.783 |
| Phosphorous Pentafluoride | PF5 |
0.346 |
| Phosphorous Trifluoride | PF3 |
0.495 |
| Propane | C3H8 |
0.343 |
| Propylene (Propene) | C3H6 |
0.401 |
| Silane | SiH4 |
0.625 |
| Silicon Tetrafluoride | SiF4 |
0.395 |
| Sulfur Dioxide | SO2 |
0.728 |
| Sulfur Hexafluoride | SF6 |
0.27 |
| Sulfur Tetrafluoride | SF4 |
0.353 |
| Sulfuryl Fluoride | SO2F2 |
0.423 |
| Tetrachloromethane | CCl4 |
0.344 |
| Tetrafluoroethylene (TFE) | C2F4 |
0.361 |
| Tetrafluorohydrazine | N2F4 |
0.367 |
| Trichlorofluoromethane | CCl3F |
0.374 |
| Trimethylamine | (CH3)3N |
0.316 |
| Uranium Hexafluoride | UF6 |
0.22 |
| Vinyl Bromide | C2H3Br |
0.524 |
| Vinyl Chloride | C2H3Cl |
0.542 |
| Vinyl Fluoride | C2H3F |
0.576 |
| Xenon | Xe |
1.383 |
| 1,1,2-Trichloro-1,1,2-Trifluoroethane | C2Cl3F3 |
0.231 |
| 1,2-Dibromotetrafluoroethane | C2Br2F4 |
0.215 |
| 1,2-Dichloroethane | C2H4Cl2 |
0.382 |
| Bromine Pentafluoride | BrF5 |
0.287 |
| Bromine Trifluoride | BrF3 |
0.439 |
| Carbon Tetrachloride | CCl4 |
0.344 |
| Chloroform (Trichloromethane) | CHCl3 |
0.442 |
| Hexane | C6H14 |
0.204 |
| Hydrogen Cyanide | HCN |
0.744 |
| Iodine Pentafluoride | IF5 |
0.283 |
| Isopentane | C5H12 |
0.211 |
| Nickel Carbonyl | Ni(CO)4 |
0.212 |
| Nitrogen Dioxide | NO2 |
0.758 |
| Pentane (n-Pentane) | C5H12 |
0.212 |
| Silicon Tetrachloride | SiCl4 |
0.31 |
| Trichlorosilane | SiHCl3 |
0.329 |
| Tungsten Hexafluoride | WF6 |
0.227 |
| Water Vapor | H2O |
0.861 |
| 50% PH3 / 50% SiH4 (mixture) | Mixture |
0.668 |